Aerosol Coating System ACS 200 for nFOG™ wet coating R&D

Aerosol Coating System ACS 200 for nFOG™ wet coating R&D

Beneq’s latest atmospheric pressure nFOG wet coating technology can coat the most sensitive substrates, along with those of different thicknesses, shapes or size variations. Typical coating uniformity is better than ±3%.

The aerosol-based process works with a wide range of liquid source materials, including water- or alcohol-based solutions or colloids. Typical dry coating thicknesses range from 10–500 nm. As the deposition system has no moving parts, the process is robust and repeatable.

For researchers, Beneq offers ACS 200 lab scale equipment that combines fast sampling with low material consumption. It accommodates up to 200 mm round wafers or other substrate materials. Before scaling up, customers can rent a pilot-scale test system that processes substrates up to 800 × 1400 mm. For full industrial production, Beneq provides turnkey solutions or an integrated coating system within an existing production line.

ACS 200 main features:

•  fast sampling
•  sample size up to 200 mm
•  full-automatic coating process
•  dual independent material feeds
•  safety enclosure

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