Products

Aerosol Coating System ACS 200 for nFOG™ wet coating R&D

FCS 500 Beneq nHALO® coating systems

TFS 200 ALD tool for research

Beneq-Glaston TFC2000™, TCO-coating for the solar industry (in co-operation with Glaston)

TFS 200R Thin Film System TFS 200R for spatial ALD research

TFS 500 Thin Film System TFS 500 for ALD research and batch production

TFS 600 for industrial OLED encapsulation

TFS 1200 for in-line and batch production of buffer layer on CIGS cells

TFS NX300 for industrial surface passivation of c-Si solar cells

P400A and P800 for industrial production