TFS 1200 for in-line and batch production of buffer layer on CIGS cells

TFS 1200 for in-line and batch production of buffer layer on CIGS cells

The Beneq TFS 1200 is an application-specific system designed for industrial in-line production of buffer layer coatings on copper-indium-gallium-diselenide (CIGS) thin film solar cells. The maximum substrate size is 1200 × 1200 (mm), a recognized world-record in substrate size in ALD.

Coating specifications:

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