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X'Pert PRO MRD и X'Pert PRO MRD (XL)

X'Pert PRO MRD и X'Pert PRO MRD (XL)

PANalytical's X'Pert PRO Materials Research Diffractometer is the most flexible system available for X-ray diffraction studies for:
  • advanced materials science and nanotechnology
  • metrologic characterization in semiconductor process development

It can handle a wide range of applications, and is especially suitable for thin film analysis applications such as:
  • rocking curve analysis and reciprocal space mapping
  • reflectometry and thin film phase analysis
  • residual stress and texture analysis

As well as the proven standard version of the X'Pert PRO MRD system, a number of special versions exist:
  • With the X'Pert PRO MRD system for in-plane diffraction, it becomes possible to measure diffraction from lattice planes that are perpendicular to the sample surface
  • The X'Pert PRO Extended MRD allows mounting of an X-ray mirror and a high-resolution monochromator in-line, increasing the intensity of the incident beam
  • The X'Pert PRO MRD XL meets all the high-resolution XRD analysis requirements of the semiconductors, thin films, and advanced materials industries 
  • By facilitating analysis of wafers up to 300 mm in diameter, with a sophisticated, automatic wafer loader option, the X'Pert PRO MRD XL becomes an advanced tool for thin film process development

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